專利國別

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發表日期

2014-05-14 16:51:41

本校案號

P100041A

專利名稱

奈米壓印模具之硬度加強方法「METHOD FOR ENHANCING HARDNESS OF NANOIMPRINT MOLD」

發明人

鄭友仁、譚仲明

所屬院

工學院

提案單位

機械工程學系暨研究所

類型

發明

專利權人

國立中正大學

申請號

13/279882

申請日期

2011-10-24

公開號

0

公開日期

2012-02-16

證書號

US 8,647,552 B2

核准日期

2014-02-11

國際分類號

B29C-033/38(2006.01)

專利權期間

2009.04.28~2029.04.28(延長253天至2030.01.06)

專利摘要

The present invention discloses a method for enhancing hardness of a nanoimprint mold comprising following steps of: providing a male mold, composed of a first material, for imprinting a female mold and producing a nano structural pattern on the female mold, and the female mold composed of a second material, wherein the hardness of the first material is higher than the hardness of the second material; applying a nano-indentation technique to the female mold onto the female mold by a nano-indentation apparatus having a diamond array probe so as to enhance the surface hardness of the female mold; and impressing a substrate by the female mold with the nano structural pattern having the enhanced surface.

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